[1] Kose, T, Azgin, K, Akin, T (2016) Design and fabrication of a high performance resonant MEMS temperature sensor. J Micromech Microeng 26(4): 045012.

[2] سید کاظم ویلیانی ن، هاشمی م، وادی زاده هـ، پوررستمی ح، مصطفوی س م، هاشمی زاده ف    (1393) مدل‌سازی و بررسی تجربی فشارسنج       میکرو الکترومکانیکی پیزومقاومتی بر اساس الزامات عملکرد صنعت پتروشیمی. مهندسی مکانیک مدرس 357-349 :(16)14.

[3] Chen F, Zhao Y, Wang J, Zou H, Kraft M, Li X (2017) A single-side fabricated triaxis (111)-silicon microaccelerometer with electromechanical sigma–delta modulation. IEEE Sen J 18(5): 1859-1869.

[4] عبداللهی ح، سمائی فر ف،  حق نگهدار ا (1394) بررسی اثر به‌کارگیری SiO2/Al در بالا بردن حساسیت آشکارسازهای مادون‌قرمز بر پایه میکروکانتیلیور و مقایسه آن با Si3N4/Au. مجله مکانیک سازه­ها و شاره­ها  1637-151 :(3)5.

[5] مجاهدی م، بینا ر (1397) بررسی ناپایداری و رفتار ارتعاشی میکروتیرژیروسکوپی با در نظر گرفتن گستردگی جرم گواه. مجله مکانیک سازه­ها و شاره­ها  106-93 :(2)8.

[6] اکرمی نیا ا، اختراعی طوسی ح (1399) تاثیر انحنای میکروتیر و الکترود بر ناپایداری‌های جذب و اسنپ-ترو. مهندسی مکانیک امیرکبیر 150-141 :(8)22.

[7] Gomez M, Moulton DE, Vella D (2017) Delayed pull-in transitions in overdamped MEMS devices. J Micromech and Microeng 28(1): 015006.

[8] Sun Y, Nelson BJ (2007) MEMS capacitive force sensors for cellular and flight biomechanics. Biomed Mater 2(1): S16.

[9] Bouchaala A, Nayfeh AH, Younis MI (2017) Analytical study of the frequency shifts of micro and nano clamped–clamped beam resonators due to an added mass. Meccanica 52(1-2): 333-348.

[10] Park SW, Das PS, Chhetry A, Park JY (2017) A flexible capacitive pressure sensor for wearable respiration monitoring system. IEEE Sens J 17(20): 6558-6564.

[11] Karumuthil SC, Singh K, Valiyaneerilakkal U, Akhtar J, Varghese S (2020) Fabrication of poly (vinylidene fluoride-trifluoroethylene)–Zinc oxide based piezoelectric pressure sensor. Sens  Actuators A 303: 111677.

[12] Fu X, Xu L (2019) Multi-field coupled chaotic vibration for a micro resonant pressure sensor. Appl Math Modell 72: 470-485.

[13] Sujan Y, Uma G, Umapathy M (2016) Design and testing of piezoelectric resonant pressure sensor. Sens Actuators A 250: 177-186.

[14] Yenuganti S, Gandhi U, Umapathy M (2017) Piezoelectric microresonant pressure sensor using aluminum nitride. J Micro/Nanolithogr, MEMS MOEMS 16(2): 025001.

[15] Arefin MS, Redouté JM, Yuce MR (2016) A low-power and wide-range MEMS capacitive sensors interface IC using pulse-width modulation for biomedical applications. IEEE Sens J 16(17): 6745-6754.

[16] Balavalad KB, Sheeparamatti B, Math VB (2017) Design and simulation of MEMS capacitive pressure sensor array for wide range pressure measurement. Int J Comput Appl 163(6): 39-46.

[17] Parthasarathy E, Malarvizhi S (2018) Modeling analysis and fabrication of MEMS capacitive differential pressure sensor for altimeter application. J Chin Inst Eng 41(3): 206-215.

[18] Mishra RB, Kumar SS, Mukhiya R (2019) Design and simulation of capacitive pressure sensor for blood pressure sensing application. Recent Trends in Communication, Computing, and Electronics. Springer, Singapore.

[19] Panwar LS, Kala S, Panwar V, Panwar SS, Sharma S (2017) Design of MEMS piezoelectric blood pressure sensor. Proc IEEE 3rd Int Conf Adv Comp Commun Autom (ICACCA).

[20] Seo Y, Kim D, Hall NA (2019) Piezoelectric pressure sensors for hypersonic flow measurements at high-temperatures. J Acoust Soc Am 146(4): 2997-2997.

[21] Seo Y, Kim D, Hall NA (2019) Piezoelectric pressure sensors for hypersonic flow measurements. J Microelectromech Sys 28(2): 271-278.

[22] Zhu L, Xing Y, Xie B, Xiang C, Lu Y, Chen D, Wang J, Chen J (2017) A high-quality resonant pressure micro sensor with through-silicon-via electrical interconnections. Proc. IEEE 19th Int. Conf. Solid-State. Sens. Actuators. Microsys (TRANSDUCERS). 82-85.

[23] Yan P, Lu Y, Xiang C, Wang J, Chen D, Chen J (2019) A temperature-insensitive resonant pressure micro sensor based on silicon-on-glass vacuum packaging. Sensors 19(18): 3866.

[24] Banerji S, Michalik P, Fernández D, Madrenas J, Mola A, Montanyà J (2017) CMOS-MEMS resonant pressure sensors: optimization and validation through comparative analysis. Micros Technol 23(9): 3909-3925.

[25] Rao SS (2007) Vibration of continuous systems.  John Wiley & Sons, New Jersey.

[26] Reddy JN (2006) Theory and analysis of elastic plates and shells. 2nd edn.  CRC press, New York.

[27] Lai WM, Rubin DH, Krempl E, Rubin D (2009) Introduction to continuum mechanics. 4th edn.  Butterworth-Heinemann, London.

[28] Reddy JN (2007) An introduction to continuum mechanics. Cambridge university press, New York.

[29] Chao PC, Chiu C, Tsai C (2006) A novel method to predict the pull-in voltage in a closed form for micro-plates actuated by a distributed electrostatic force. J Micromech Microeng 16(5): 986.

[30] Nayfeh AH, Mook DT (1979) Nonlinear oscillations. John Wiley & Sons, USA.

[31] Nayfeh AH (1993) Introduction to perturbation techniques.  John Wiley & Sons, USA.

[32] Nayfeh AH (1973) Perturbation methods. John Wiley & Sons, USA.

[33] Timoshenko SP, Woinowsky-Krieger S (1959) Theory of plates and shells. 2nd edn.  McGraw-hill, USA.

[34] Ke LL, Wang YS, Yang J, Kitipornchai S (2012) Free vibration of size-dependent Mindlin microplates based on the modified couple stress theory. J Sound Vib 331(1): 94-106.

[35] Thai CH, Ferreira AJM, Phung-Van P (2020) Free vibration analysis of functionally graded anisotropic microplates using modified strain gradient theory. Eng Anal Bound Elem 117: 284-298.

[36] Ahmad B, Pratap R (2010) Elasto-electrostatic analysis of circular microplates used in capacitive micromachined ultrasonic transducers. IEEE Sens J 10(11): 1767-1773.

[37] Li Z, Zhao L, Jiang Z, Ye Z , Zhao Y (2014) An improved method for the mechanical behavior analysis of electrostatically actuated microplates under uniform hydrostatic pressure. J Microelectromech Syst 24(2): 474-485.